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Basic concepts for the MIL Metrology module



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The basic concepts and vocabulary conventions for the MIL Metrology module are:

  • Active edgels. The edgels within the metrology region that adhere to certain constraints.

  • Constructed feature. A geometric primitive that has been mathematically defined or geometrically derived from a set of other features.

  • Edge. A curve that delineates a boundary, which can be established from intensity transitions in an image.

  • Edgel. Elementary points (or edge elements) within an edge. Each edgel represents an X- and Y-position, and the angular direction of the gradient.

  • Fitted edgels. The active edgels that are used to build a fitted feature.

  • Geometric tolerance. The acceptable deviation from the definition of a feature, or the acceptable relationship between multiple features.

  • Global frame. The metrology template's default reference frame.

  • Gradient angle. The angle between the target image's horizontal axis and the edge's perpendicular direction (from black to white) at each edgel location.

  • Iterative fit. The calculated fit resulting from one of the iterations during the iteration process.

  • Local frame. A constructed reference frame.

  • (Physically) measured feature. A geometric primitive that can be physically measured using the edgels in the metrology region.

  • Metrology context. The container for all features and geometric tolerances of the metrology template, and global processing settings.

  • Metrology region. The delimited area in the target image from which to select the edgels used to establish a physically measured feature.

  • Metrology region orientation. The alignment of a metrology region, with respect to a reference frame.

  • Metrology template. The set of all features and geometric tolerances.

  • Output frame. The coordinate system in which feature results are returned.

  • Parametrically constructed feature. A geometric primitive that has been mathematically defined, rather than geometrically derived from a set of other features.

  • Reference frame. The coordinate system in which features are defined and to which they are relative.

  • Target image. The image in which to extract physically measured features, build constructed features, and verify geometric tolerances.

  • Template reference. An image (or result buffer) that represents an example of a target image, used to help build or modify a metrology template.